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          Image Dimension Measurement SystemIM-7000 series

          IM-7030T

          Measurement Head

          SPECIFICATIONS

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          Model

          IM-7030T

          Type

          Head
          Contact Height Measurement Unit

          Image sensor

          1” 6.6 mega pixel monochrome CMOS

          Display

          10. 4” LCD monitor (XGA: 1024 × 768)

          Receiver lens

          Double telecentric lens

          Image measurement

          Field of view

          Wide-field measurement mode: 300 mm × 200 mm (4× R50)
          High-precision measurement mode: 225 × 125 mm

          Minimum display unit

          0.1 µm

          Repeatability

          W/o stage movement

          Wide-field measurement mode: ±1 µm
          High-precision measurement mode: ±0.5 µm

          With stage movement

          Wide-field measurement mode: ±2 µm
          High-precision measurement mode: ±1.5 µm

          Measurement accuracy (±2σ)

          W/o binding

          Wide-field measurement mode: ±5 µm*1
          High-precision measurement mode: ±2 µm*2

          With binding

          Wide-field measurement mode: ±(7 + 0.02 L) µm*3
          High-precision measurement mode: ± (4 + 0.02 L) µm*4

          Light probe Measurement

          Measurable area (XY)

          190 × 90 mm

          Maximum measurement depth

          30 mm

          Light probe diameter

          ø3 mm

          Measuring force

          0.015 N

          Repeatability

          ±2 µm*5

          Measurement accuracy

          ±(8 + 0.02 L) µm*6

          Height Measurement

          Measurement range

          0 to 75 mm

          Measuring force

          0.3 N

          Measurement accuracy (XY)

          ±0.2 mm*7

          Minimum display unit

          1 µm

          Measurable area (XY)

          Wide-field measurement mode: 145 × 95 mm
          High-precision measurement mode: 107.5 × 95 mm

          Repeatability

          ±2 µm*8

          Measurement accuracy

          ±7.5 µm*9

          External remote input

          Non-voltage input (with and without contact)

          External output

          OK/NG/FAIL/MEAS.

          PhotoMos output
          Rated load 24 VDC 0.5 A
          ON resistance 50 mΩ or lower

          Interface

          LAN

          RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

          USB 2.0 series A

          6 ports (front: 2, rear: 4)

          Record

          Hard disk drive

          500 GB

          Illumination system

          Transparent

          Telecentric transparent illumination

          Ring

          Four division, multi-angle illumination (electric)
          Slit ring (directivity) illumination (electric)

          XY stage

          Moving range

          200 × 100 mm (electric)

          Withstand load

          7.5 kg

          Z stage

          Moving range

          75 mm (electric)

          Power supply

          Power voltage

          100–240 VAC, 50/60 Hz

          Current consumption

          430 VA or lower

          Environmental resistance

          Operating ambient temperature

          +10°C to 35°C

          Operating ambient humidity

          20% RH to 80% RH (no condensation)

          Weight

          Approx. 35 kg

          *1 In the range of ø80 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position
          *2 In the range of ø20 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position
          *3 In the range of 280 × 180 mm (4× R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units)
          *4 In the range of 220 × 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units)
          *5 When the detection system is standard. If the detection system is at a deep position, then ±3 µm
          *6 When the detection system is standard, and the ambient temperature is +23°C ±1°C, with a stage load weighing 3 kg or less. If the detection system is at a deep position,then ±(10 + 0.02 L) µm with L as the measurement length in mm.
          *7 Operating ambient temperature: 23°C ±1°C.
          *8 With a maximum measurement height of 30 mm or less. ±3 µm when maximum measurement height is between 30 mm and 75 mm.
          *9 With a maximum measurement height of 30 mm or less. ±9.5 µm when maximum measurement height is between 30 mm and 75 mm.

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