Surface scanning laser displacement meter. Z-axis scanning for accuracy and resolution. X-axis scanning for stability. Transparents targets are not a problem.
Two directional scanning for excellent resolution and stability.
Excellent resolution of 0.3µm for high-accuracy applications
Wide, x-axis scanning results in ultra stable measurements.
Setup is quick and easy using a special remote console.
Small spot size enables measurement of microscopic targets.
Film thickness and surface condition of transparent targets can easily be obtained using the confocal scan method.
Light intensity integration function and confocal scanning enable high stability.
Angle measurements can be made in 0.01 degree increments