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Warpage is generally measured by detecting a target at three points.
Measurement is also possible by moving a target with a point-type sensor, or by directly measuring the shape by projecting a laser in a horizontal line.
Depending on measurement conditions and targets, methods may differ and special arrangements can be made, so contact your nearest sales office with any questions.
Shapes are directly measured by exposing the target to a line laser. Warpage is then measured using the measured waveform data. By moving the target while scanning it is also possible to make measurements of 3D shapes.
After scanning a target using an reflective type measurement instrument, the warpage is measured using the height data of any three points. The LKG Series offers ultrahigh speed sampling, allowing for stable measurements even if the target is moving.
To measure warpage, contact sensors are used for detection at three points.
Measurement can be easily performed by setting the warpage measurement mode using the calculation function of the GT2 Series instrument.
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