Image Dimension Measurement System

IM-7000 series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Measurement Head IM-7030T

IM-7030T - Measurement Head

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Specifications

Model			IM-7030T
Type			Head Contact Height Measurement Unit
Image sensor			1” 6.6 mega pixel monochrome CMOS
Display			10. 4” LCD monitor (XGA: 1024 × 768)
Receiver lens			Double telecentric lens
Image measurement	Field of view		Wide-field measurement mode: 300 mm × 200 mm (4× R50) High-precision measurement mode: 225 × 125 mm
	Minimum display unit		0.1 µm
	Repeatability	W/o stage movement	Wide-field measurement mode: ±1 µm High-precision measurement mode: ±0.5 µm
		With stage movement	Wide-field measurement mode: ±2 µm High-precision measurement mode: ±1.5 µm
	Measurement accuracy (±2σ)	W/o binding	Wide-field measurement mode: ±5 µm^1 High-precision measurement mode: ±2 µm^2
		With binding	Wide-field measurement mode: ±(7 + 0.02 L) µm^3 High-precision measurement mode: ± (4 + 0.02 L) µm^4
Light probe Measurement	Measurable area (XY)		190 × 90 mm
	Maximum measurement depth		30 mm
	Light probe diameter		ø3 mm
	Measuring force		0.015 N
	Repeatability		±2 µm^*5
	Measurement accuracy		±(8 + 0.02 L) µm^*6
Height Measurement	Measurement range		0 to 75 mm
	Measuring force		0.3 N
	Measurement accuracy (XY)		±0.2 mm^*7
	Minimum display unit		1 µm
	Measurable area (XY)		Wide-field measurement mode: 145 × 95 mm High-precision measurement mode: 107.5 × 95 mm
	Repeatability		±2 µm^*8
	Measurement accuracy		±7.5 µm^*9
Interface	LAN		RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
	USB 3.1		4 ports (rear: 4)
	USB 2.0 series A		2 ports (front: 2)
External remote input			Non-voltage input (with and without contact)
External output	OK/NG/FAIL/MEAS.		PhotoMos output Rated load 24 VDC 0.5 A ON resistance 50 mΩ or lower
Record	Hard disk drive		500 GB
Illumination system	Transparent		Telecentric transparent illumination
	Ring		Four division, multi-angle illumination (electric) Slit ring (directivity) illumination (electric)
XY stage	Moving range		200 × 100 mm (electric)
	Withstand load		7.5 kg
Z stage	Moving range		75 mm (electric)
Power supply	Power voltage		100–240 VAC, 50/60 Hz
	Current consumption		430 VA or lower
Environmental resistance	Ambient temperature		+10°C to 35°C
	Relative humidity		20% RH to 80% RH (no condensation)
Weight			Approx. 35 kg
^1 In the range of ø80 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position ^2 In the range of ø20 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position ^3 In the range of 280 × 180 mm (4× R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units) ^4 In the range of 220 × 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units) ^5 When the detection system is standard. If the detection system is at a deep position, then ±3 µm ^6 When the detection system is standard, and the ambient temperature is +23°C ±1°C, with a stage load weighing 3 kg or less. If the detection system is at a deep position,then ±(10 + 0.02 L) µm with L as the measurement length in mm. ^7 Operating ambient temperature: 23°C ±1°C. ^8 With a maximum measurement height of 30 mm or less. ±3 µm when maximum measurement height is between 30 mm and 75 mm. ^*9 With a maximum measurement height of 30 mm or less. ±9.5 µm when maximum measurement height is between 30 mm and 75 mm.

Data Sheet (PDF) Other Models