Position detection of wafer notches
The vision system detects the rotational position of wafer notches.
The resolution of the 5 Mega pixel camera and the built-in algorithms of the Trend Edge Stain tool makes it possible to stably detect the notch and also output the position and dimensional data.
- Benefit
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A 2 Mega-pixel camera was used to detect the position of the notch, but the repeatability of the camera was not stable. By implementing the XG Series system, a 5 Mega pixel high-speed camera and the new Trend Edge Stain tool, the notch was stably located.
LEARN THE DETAILS OF THE PRODUCT
- XG-7000 series
Customizable Vision System -
The XG Series offers standard programming directly with the controller or advanced programming using the optional Vision Editor PC software.
- XG-7000 series
- CV-X series
Intuitive Vision System -
High Performance, Icon-driven system with easy-to-use tools for simple setup by any user.
- CV-X series
- CV-5000 series
Intuitive Vision System -
The CV-5000 Series has the largest number of camera types for its class, letting you select the optimum camera for a wide range of applications.
- CV-5000 series
- CV-3000 seriesDiscontinued
Intuitive Vision System -
Providing the ultimate flexibility with a wide variety of camera choices using the industry's highest-performance image processing engine.
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Technical Guides
- CV-3000 seriesDiscontinued
