Wafer edge profile
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Industry:
- Semiconductors/LCDs
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Products:
- Measurement Sensors

Edge profiles of wafers are measured after polishing. The LJ-X Series can measure the cross-sectional shape instantly. The edge profile can be inspected along the entire circumference by rotating the wafer. Even subtle shape changes can be detected in superhigh- definition with a minimum pitch of 2.5 μm.
